Patent details

Basic Information

Publication number:

EP2742167

PCT Application Number:

NL2012050540

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP127485712

PCT Publication Number:

WO2013022339

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

METHOD AND APPARATUS FOR DEPOSITING ATOMIC LAYERS ON A SUBSTRATE

French Title of Invention:

PROCÉDÉ ET APPAREIL POUR LE DÉPÔT DE COUCHES ATOMIQUES SUR UN SUBSTRAT

German Title of Invention:

VERFAHREN UND VORRICHTUNG ZUR ATOMLAGENABSCHEIDUNG AUF EIN SUBSTRAT

SPC Number:

Dates

Filing date:

30/07/2012

Grant date:

17/10/2018

EP Publication Date:

18/06/2014

PCT Publication Date:

14/02/2013

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

17/10/2018

EP B1 Publication Date:

17/10/2018

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

30/07/2019

Expiration date:

30/07/2032

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

10/10/2018

 

 

Name:

Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

Address:

Anna van Buerenplein 1, 2595 DA 's-Gravenhage, Netherlands (NL)

Inventor

1

Name:

VAN DEN BOER, Matijs C.

Address:

Netherlands (NL)

2

Name:

KNAAPEN, Raymond Jacobus Wilhelmus

Address:

Netherlands (NL)

3

Name:

MAAS, Diederik Jan

Address:

Netherlands (NL)

4

Name:

ROOZEBOOM, Freddy

Address:

Netherlands (NL)

5

Name:

OLIESLAGERS, Ruud

Address:

Netherlands (NL)

6

Name:

VAN DER DONCK, Jacques Cor Johan

Address:

Netherlands (NL)

7

Name:

VAN DEN BERG, Dennis

Address:

Netherlands (NL)

Priority

Priority Number:

11177166

Priority Date:

10/08/2011

Priority Country:

European Patent Office (EPO) (EP)

Classification

IPC classification:

C23C 16/44; C23C 16/455; C23C 16/458; C23C 16/52; C23C 16/54;

Publication

European Patent Bulletin

Issue number:

201842

Publication date:

17/10/2018

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages