Patent details

Basic Information

Publication number:

EP2818526

PCT Application Number:

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP141747097

PCT Publication Number:

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

Chemical mechanical polishing slurry compositions and method using the same for copper and through-silicon via applications

French Title of Invention:

Compositions de pâte de polissage chimique mécanique et procédé d'utilisation de celui-ci pour des applications d'interconnexion et de cuivre

German Title of Invention:

Zusammensetzung für chemisch-mechanisches Polieren und Verfahren damit für Kupfer- und Silicium-Durchkontaktierungsanwendungen

SPC Number:

Dates

Filing date:

27/06/2014

Grant date:

22/06/2016

EP Publication Date:

22/06/2016

PCT Publication Date:

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

31/12/2014

EP B1 Publication Date:

22/06/2016

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

27/06/2016

Expiration date:

27/06/2034

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

27/06/2014

 

 

Name:

AIR PRODUCTS AND CHEMICALS INC.

Address:

7201 Hamilton Boulevard, Allentown, PA 18195-1501, United States (US)

Inventor

1

Name:

Shi Xiaobo

Address:

United States (US)

2

Name:

Murella Krishna P.

Address:

United States (US)

3

Name:

Schlueter James Allen

Address:

United States (US)

4

Name:

Choo Jae Ouk

Address:

United States (US)

Priority

Priority Number:

201313929346

Priority Date:

27/06/2013

Priority Country:

United States (US)

Classification

Main IPC Class:

C09G 1/02;

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages