Patent details

Basic Information

Publication number:

EP1354980

PCT Application Number:

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP030087233

PCT Publication Number:

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

Method for forming a porous SiOCH layer.

French Title of Invention:

Procédé de production d'un film en SiOCH poreux

German Title of Invention:

Verfahren zur Herstellung einer porösen SiOCH-Schicht

SPC Number:

Dates

Filing date:

16/04/2003

Grant date:

23/02/2011

EP Publication Date:

23/02/2011

PCT Publication Date:

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

22/10/2003

EP B1 Publication Date:

23/02/2011

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

16/04/2011

Expiration date:

16/04/2023

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

16/04/2003

 

 

Name:

AIR PRODUCTS AND CHEMICALS INC.

Address:

7201 Hamilton Boulevard, Allentown, PA 18195-1501, United States (US)

Inventor

1

Name:

Xiao Manchao

Address:

United States (US)

2

Name:

Vincent Jean Louise

Address:

United States (US)

3

Name:

Norman John Anthony Thomas

Address:

United States (US)

4

Name:

Vrtis Raymond Nicholas

Address:

United States (US)

5

Name:

Lukas Aaron Scott

Address:

United States (US)

6

Name:

O'Neill Mark Leonard

Address:

United States (US)

Priority

1

Priority Number:

373104 P

Priority Date:

17/04/2002

Priority Country:

United States (US)

2

Priority Number:

150798

Priority Date:

17/05/2002

Priority Country:

United States (US)

3

Priority Number:

409468

Priority Date:

07/04/2003

Priority Country:

United States (US)

Classification

Main IPC Class:

C23C 16/40;

Filing date	Document type	Number of pages