Patent details
EP2282188 Title: ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS
Basic Information
- Publication number:
- EP2282188
- PCT Application Number:
- PCT/JP/2009/058802
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP097545560
- PCT Publication Number:
- WO/2009/145048
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- Not available
- English Title of Invention:
- ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS
- French Title of Invention:
- SYSTÈME OPTIQUE D'ÉCLAIRAGE ET DISPOSITIF D'EXPOSITION
- German Title of Invention:
- OPTISCHES BELEUCHTUNGSSYSTEM UND BELICHTUNGSGERÄT
- SPC Number:
Dates
- Filing date:
- 12/05/2009
- Grant date:
- 11/03/2015
- EP Publication Date:
- 11/03/2015
- PCT Publication Date:
- 03/12/2009
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 09/02/2011
- EP B1 Publication Date:
- 11/03/2015
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 12/05/2015
- Expiration date:
- 12/05/2029
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 01/08/2015
- Name:
- Nikon Corporation
- Address:
- 15-3, Konan 2-chome Minato-ku, Tokyo 108-6290, Japan (JP)
Inventor
1
- Name:
- TANAKA Hirohisa
- Address:
- Japan (JP)
2
- Name:
- TANITSU Osamu
- Address:
- Japan (JP)
Priority
- Priority Number:
- 2008138841
- Priority Date:
- 28/05/2008
- Priority Country:
- Japan (JP)
Classification
- Main IPC Class:
- G01M 11/00;
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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