Patent details
EP3039484 Title: STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE
Basic Information
- Publication number:
- EP3039484
- PCT Application Number:
- EP2014067749
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP147528863
- PCT Publication Number:
- WO2015028371
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE
- French Title of Invention:
- COMPOSÉS MÉTALLIQUES STABLES EN TANT QUE MASQUES DURS ET MATÉRIAUX DE REMPLISSAGE, LEURS COMPOSITIONS ET PROCÉDÉS D'UTILISATION
- German Title of Invention:
- STABILE METALLVERBINDUNGEN ALS HARTMASKEN UND FÜLLMATERIALIEN, ZUSAMMENSETZUNGEN DARAUS UND VERFAHREN ZUR VERWENDUNG
- SPC Number:
Dates
- Filing date:
- 20/08/2014
- Grant date:
- 18/07/2018
- EP Publication Date:
- 06/07/2016
- PCT Publication Date:
- 05/03/2015
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 18/07/2018
- EP B1 Publication Date:
- 18/07/2018
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 20/08/2018
- Expiration date:
- 20/08/2034
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 11/07/2018
- Name:
- AZ Electronic Materials (Luxembourg) S.à.r.l.
- Address:
- 46 Place Guillaume ll, 1648 Luxembourg, Luxembourg (LU)
Inventor
1
- Name:
- WOLFER, Elizabeth
- Address:
- United States (US)
2
- Name:
- MCKENZIE, Douglas
- Address:
- United States (US)
3
- Name:
- MULLEN, Salem K.
- Address:
- United States (US)
4
- Name:
- YAO, Huirong
- Address:
- United States (US)
5
- Name:
- CHO, JoonYeon
- Address:
- United States (US)
6
- Name:
- PADMANABAN, Munirathna
- Address:
- United States (US)
Priority
- Priority Number:
- 201314015222
- Priority Date:
- 30/08/2013
- Priority Country:
- United States (US)
Classification
- IPC classification:
- C08G 77/58; C08G 79/00; G03F 7/09; H01L 21/027;
Publication
European Patent Bulletin
- Issue number:
- 201829
- Publication date:
- 18/07/2018
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
| Filing date | Document type | Number of pages |
|---|---|---|
| 31/12/2018 | Outgoing Correspondence | 1 |