Patent details
EP2428541 Title: Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films
Basic Information
- Publication number:
- EP2428541
- PCT Application Number:
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP111799854
- PCT Publication Number:
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films
- French Title of Invention:
- Composition aqueuse de polissage et procédé de polissage mécanique chimique de substrats contenant des films diélectriques en oxyde de silicium et polysilicone
- German Title of Invention:
- Wässrige Polierzusammensetzung und Verfahren zum chemisch-mechanischen Polieren von Substraten mit dielektrischen Siliciumoxid- und Polysiliciumfilmen
- SPC Number:
Dates
- Filing date:
- 05/09/2011
- Grant date:
- 06/03/2019
- EP Publication Date:
- 14/03/2012
- PCT Publication Date:
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 06/03/2019
- EP B1 Publication Date:
- 06/03/2019
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 05/09/2019
- Expiration date:
- 05/09/2031
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 27/02/2019
- Name:
- BASF SE
- Address:
- Carl-Bosch-Strasse 38, 67056 Ludwigshafen am Rhein, Germany (DE)
Inventor
1
- Name:
- Pinder, Harvey Wayne
- Address:
- United States (US)
2
- Name:
- Chiu, Wei Lan William
- Address:
- Taiwan (TW)
3
- Name:
- Chu, Jea-Ju
- Address:
- Taiwan (TW)
4
- Name:
- Li, Yuzhuo
- Address:
- Germany (DE)
5
- Name:
- Venkataraman, Shyam Sundar
- Address:
- Taiwan (TW)
Priority
- Priority Number:
- 380719 P
- Priority Date:
- 08/09/2010
- Priority Country:
- United States (US)
Classification
- IPC classification:
- C09G 1/02; C09K 3/14; C09K 13/00; H01L 21/3105;
Publication
European Patent Bulletin
- Issue number:
- 201910
- Publication date:
- 06/03/2019
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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