Patent details
EP2927749 Title: CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
Basic Information
- Publication number:
- EP2927749
- PCT Application Number:
- JP2013078211
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP138510771
- PCT Publication Number:
- WO2014069245
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
- French Title of Invention:
- CONTENANT DE SOLUTION DE TRAITEMENT ORGANIQUE POUR LA GÉNÉRATION DE MOTIF SUR FILM EN PHOTORÉSINE AMPLIFIÉE CHIMIQUEMENT, PROCÉDÉ DE FORMATION DE MOTIFS, ET PROCÉDÉ DE FABRICATION DE DISPOSITIF ÉLECTRONIQUE
- German Title of Invention:
- BEHÄLTER FÜR EINE ORGANISCHE BEHANDLUNGSLÖSUNG ZUR STRUKTURIERUNG EINES CHEMISCH VERSTÄRKTEN LACKFILMS, VERFAHREN ZUR STRUKTURFORMUNG, VERFAHREN ZUR HERSTELLUNG EINER ELEKTRONISCHEN VORRICHTUNG
- SPC Number:
Dates
- Filing date:
- 17/10/2013
- Grant date:
- 11/12/2019
- EP Publication Date:
- 07/10/2015
- PCT Publication Date:
- 08/05/2014
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 11/12/2019
- EP B1 Publication Date:
- 11/12/2019
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 17/10/2020
- Expiration date:
- 17/10/2033
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 04/12/2019
- Name:
- FUJIFILM Corporation
- Address:
- 26-30, Nishiazabu 2-chome Minato-ku, Tokyo 106-8620, Japan (JP)
Inventor
1
- Name:
- KAWAMOTO, Takashi
- Address:
- Japan (JP)
2
- Name:
- YAMANAKA, Tsukasa
- Address:
- Japan (JP)
Priority
1
- Priority Number:
- 2012240752
- Priority Date:
- 31/10/2012
- Priority Country:
- Japan (JP)
2
- Priority Number:
- 2013031277
- Priority Date:
- 20/02/2013
- Priority Country:
- Japan (JP)
Classification
- IPC classification:
- B65D 81/24; G03F 7/038; G03F 7/039; G03F 7/30; G03F 7/32; H01L 21/027;
Publication
European Patent Bulletin
- Issue number:
- 201950
- Publication date:
- 11/12/2019
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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