Patent details

Basic Information

Publication number:

EP2195834

PCT Application Number:

US2008077203

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP088319470

PCT Publication Number:

WO2009039486

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS

French Title of Invention:

SYSTÈMES ET PROCÉDÉS POUR LA CRÉATION DE DONNÉES PERSISTANTES POUR UNE PLAQUETTE ET POUR L'UTILISATION DE DONNÉES PERSISTANTES POUR LES FONCTIONS LIÉES AUX INSPECTIONS

German Title of Invention:

SYSTEME UND VERFAHREN ZUM ERZEUGEN VON PERSISTENTEN DATEN FÜR EINEN WAFER UND ZUR VERWENDUNG PERSISTENTER DATEN FÜR UNTERSUCHUNGSBEZOGENE FUNKTIONEN

SPC Number:

Dates

Filing date:

22/09/2008

Grant date:

24/06/2020

EP Publication Date:

16/06/2010

PCT Publication Date:

26/03/2009

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

24/06/2020

EP B1 Publication Date:

24/06/2020

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

22/09/2020

Expiration date:

22/09/2028

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

17/06/2020

 

 

Name:

KLA-Tencor Corporation

Address:

One Technology Drive, Milpitas, CA 95035, United States (US)

Inventor

1

Name:

CAMPOCHIARO, Cecelia

Address:

United States (US)

2

Name:

MAHER, Chris

Address:

United States (US)

3

Name:

KULKARNI, Ashok

Address:

United States (US)

4

Name:

KOHLI, Alpa

Address:

United States (US)

5

Name:

BHASKAR, Kris

Address:

United States (US)

6

Name:

BHASKAR, Chetana

Address:

United States (US)

7

Name:

KHULLAR, Aneesh

Address:

United States (US)

8

Name:

BALASUBRAMANIAN, Lalita

Address:

United States (US)

9

Name:

ROSENGAUS, Eliezer

Address:

United States (US)

10

Name:

MAHADEVAN, Mohan

Address:

United States (US)

11

Name:

DUFFY, Brian

Address:

United States (US)

12

Name:

BHATTACHARYYA, Santosh

Address:

United States (US)

Priority

1

Priority Number:

974030 P

Priority Date:

20/09/2007

Priority Country:

United States (US)

2

Priority Number:

234201

Priority Date:

19/09/2008

Priority Country:

United States (US)

Classification

IPC classification:

G06T 1/20; H01L 21/66; G06T 7/00;

Publication

European Patent Bulletin

Issue number:

202026

Publication date:

24/06/2020

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages