Patent details
EP3120427 Title: SYSTEM AND METHOD FOR REDUCING THE BANDWIDTH OF A LASER AND AN INSPECTION SYSTEM AND METHOD USING A LASER
Basic Information
- Publication number:
- EP3120427
- PCT Application Number:
- US2015021462
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP157656166
- PCT Publication Number:
- WO2015143152
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- SYSTEM AND METHOD FOR REDUCING THE BANDWIDTH OF A LASER AND AN INSPECTION SYSTEM AND METHOD USING A LASER
- French Title of Invention:
- SYSTÈME ET PROCÉDÉ POUR RÉDUIRE LA LARGEUR DE BANDE D'UN LASER, ET SYSTÈME ET PROCÉDÉ D'INSPECTION À L'AIDE D'UN LASER
- German Title of Invention:
- SYSTEM UND VERFAHREN FÜR DIE BANDBREITENREDUZIERUNG EINES LASERS SOWIE PRÜFSYSTEM UND VERFAHREN UNTER VERWENDUNG EINES LASERS
- SPC Number:
Dates
- Filing date:
- 19/03/2015
- Grant date:
- 23/09/2020
- EP Publication Date:
- 25/01/2017
- PCT Publication Date:
- 24/09/2015
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 23/09/2020
- EP B1 Publication Date:
- 23/09/2020
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 19/03/2021
- Expiration date:
- 19/03/2035
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 16/09/2020
- Name:
- Kla-Tencor Corporation
- Address:
- Legal Department One Technology Drive, Milpitas, California 95035, United States (US)
Inventor
1
- Name:
- FIELDEN, John
- Address:
- United States (US)
2
- Name:
- CHUANG, Yung-Ho Alex
- Address:
- United States (US)
3
- Name:
- DENG, Yujun
- Address:
- United States (US)
Priority
1
- Priority Number:
- 201461955792 P
- Priority Date:
- 20/03/2014
- Priority Country:
- United States (US)
2
- Priority Number:
- 201414300227
- Priority Date:
- 09/06/2014
- Priority Country:
- United States (US)
Classification
- IPC classification:
- G01N 21/39; H01S 3/10;
Publication
European Patent Bulletin
- Issue number:
- 202039
- Publication date:
- 23/09/2020
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
| Filing date | Document type | Number of pages |
|---|