Patent details

Basic Information

Publication number:

EP3033440

PCT Application Number:

US2014050539

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP148358278

PCT Publication Number:

WO2015023585

First applicant's nationality:

Translation Language:

EPO Publication Language:

English Title of Invention:

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

French Title of Invention:

CIBLE DE PULVÉRISATION AVEC RAINURES DE REFROIDISSEMENT ARRIÈRE

German Title of Invention:

SPUTTERZIEL MIT RÜCKSEITIGEN KÜHLRILLEN

SPC Number:

Dates

Filing date:

14/08/2014

Grant date:

21/04/2021

EP Publication Date:

22/06/2016

PCT Publication Date:

19/02/2015

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

21/04/2021

EP B1 Publication Date:

21/04/2021

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

14/08/2021

Expiration date:

14/08/2034

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

14/04/2021

 

 

Name:

Applied Materials, Inc.

Address:

3050 Bowers Avenue, Santa Clara, California 95054, United States (US)

Inventor

1

Name:

COX, Michael S.

Address:

United States (US)

2

Name:

WEST, Brian T.

Address:

United States (US)

3

Name:

OH, Jeonghoon

Address:

United States (US)

Priority

Priority Number:

201361866006 P

Priority Date:

14/08/2013

Priority Country:

United States (US)

Classification

IPC classification:

C23C 14/34; H01J 37/34;

Publication

European Patent Bulletin

Issue number:

202116

Publication date:

21/04/2021

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages