Patent details

Basic Information

Publication number:

EP3440690

PCT Application Number:

EP2017058018

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP177171063

PCT Publication Number:

WO2017174597

First applicant's nationality:

Translation Language:

EPO Publication Language:

German

English Title of Invention:

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS

French Title of Invention:

ÉLÉMENT DE FILTRE D'ÉNERGIE POUR INSTALLATIONS D'IMPLANTATION IONIQUE DESTINÉES À ÊTRE UTILISÉES DANS LA PRODUCTION DE TRANCHES

German Title of Invention:

ENERGIEFILTERELEMENT FÜR IONENIMPLANTATIONSANLAGEN FÜR DEN EINSATZ IN DER PRODUKTION VON WAFERN

SPC Number:

Dates

Filing date:

04/04/2017

Grant date:

11/08/2021

EP Publication Date:

13/02/2019

PCT Publication Date:

12/10/2017

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

11/08/2021

EP B1 Publication Date:

11/08/2021

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

04/04/2022

Expiration date:

04/04/2037

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

04/08/2021

 

 

Name:

mi2-factory GmbH

Address:

Moritz-von-Rohr-Str. 1a, 07745 Jena, Germany (DE)

Inventor

1

Name:

KRIPPENDORF, Florian

Address:

Germany (DE)

2

Name:

CSATO, Constantin

Address:

Germany (DE)

Priority

Priority Number:

102016106119

Priority Date:

04/04/2016

Priority Country:

Germany (DE)

Classification

IPC classification:

H01J 37/317;

Publication

European Patent Bulletin

Issue number:

202132

Publication date:

11/08/2021

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

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