Patent details

Basic Information

Publication number:

EP3033764

PCT Application Number:

US2014050390

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP148360597

PCT Publication Number:

WO2015023542

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

METHODS AND APPARATUS FOR DETERMINING FOCUS

French Title of Invention:

PROCÉDÉS ET APPAREIL PERMETTANT DE DÉTERMINER LA MISE AU POINT

German Title of Invention:

VERFAHREN UND VORRICHTUNG ZUR FOKUSBESTIMMUNG

SPC Number:

Dates

Filing date:

08/08/2014

Grant date:

06/10/2021

EP Publication Date:

22/06/2016

PCT Publication Date:

19/02/2015

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

06/10/2021

EP B1 Publication Date:

06/10/2021

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

08/08/2022

Expiration date:

08/08/2034

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

29/09/2021

 

 

Name:

KLA - Tencor Corporation

Address:

One Technology Drive, Milpitas, California 95035, United States (US)

Inventor

Name:

PANDEV, Stillian Ivanov

Address:

United States (US)

Priority

1

Priority Number:

201361864527 P

Priority Date:

10/08/2013

Priority Country:

United States (US)

2

Priority Number:

201414451320

Priority Date:

04/08/2014

Priority Country:

United States (US)

Classification

IPC classification:

H01L 21/027; G03F 7/20;

Publication

European Patent Bulletin

Issue number:

202140

Publication date:

06/10/2021

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages