Patent details
EP3295477 Title: SYSTEMS AND METHODS FOR OBLIQUE INCIDENCE SCANNING WITH 2D ARRAY OF SPOTS
Basic Information
- Publication number:
- EP3295477
- PCT Application Number:
- US2016030838
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP167932086
- PCT Publication Number:
- WO2016182820
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- SYSTEMS AND METHODS FOR OBLIQUE INCIDENCE SCANNING WITH 2D ARRAY OF SPOTS
- French Title of Invention:
- SYSTÈMES ET PROCÉDÉS POUR BALAYAGE À INCIDENCE OBLIQUE AVEC RÉSEAU 2D DE POINTS
- German Title of Invention:
- SYSTEME UND VERFAHREN ZUM SCANNING MIT SCHRÄGEM EINFALL MIT 2D-ANORDNUNG VON PUNKTEN
- SPC Number:
Dates
- Filing date:
- 04/05/2016
- Grant date:
- 15/12/2021
- EP Publication Date:
- 21/03/2018
- PCT Publication Date:
- 17/11/2016
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 15/12/2021
- EP B1 Publication Date:
- 15/12/2021
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 04/05/2022
- Expiration date:
- 04/05/2036
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 08/12/2021
- Name:
- KLA - Tencor Corporation
- Address:
- One Technology Drive, Milpitas, California 95035, United States (US)
Inventor
1
- Name:
- CHURIN, Yevgeniy
- Address:
- United States (US)
2
- Name:
- SULLIVAN, Jamie
- Address:
- United States (US)
Priority
1
- Priority Number:
- 201562159173 P
- Priority Date:
- 08/05/2015
- Priority Country:
- United States (US)
2
- Priority Number:
- 201514982747
- Priority Date:
- 29/12/2015
- Priority Country:
- United States (US)
Classification
- IPC classification:
- G01N 21/956; G01N 21/95; G01N 21/88; G02B 21/00; G02B 27/10; G02B 21/06; G02B 27/09; G02B 27/42; G02F 1/33; G02B 26/10; G02B 27/12;
Publication
European Patent Bulletin
- Issue number:
- 202150
- Publication date:
- 15/12/2021
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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