Patent details

Basic Information

Publication number:

EP3268505

PCT Application Number:

US2016022058

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP167626167

PCT Publication Number:

WO2016145337

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY

French Title of Invention:

PROCÉDÉ POUR TRAITEMENT PAR FAISCEAU NEUTRE BASÉ SUR UNE TECHNOLOGIE DE FAISCEAU IONIQUE D'AGRÉGATS DE GAZ

German Title of Invention:

VERFAHREN ZUR NEUTRALSTRAHLVERARBEITUNG AUF BASIS VON GASCLUSTER-IONENSTRAHLTECHNOLOGIE

SPC Number:

Dates

Filing date:

11/03/2016

Grant date:

04/05/2022

EP Publication Date:

17/01/2018

PCT Publication Date:

15/09/2016

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

04/05/2022

EP B1 Publication Date:

04/05/2022

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

11/03/2023

Expiration date:

11/03/2036

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

27/04/2022

 

 

Name:

Exogenesis Corporation

Address:

20 Fortune Drive, Billerica, Massachusetts 01821, United States (US)

Inventor

1

Name:

SVRLUGA, Richard, C.

Address:

United States (US)

2

Name:

KIRKPATRICK, Sean, R.

Address:

United States (US)

Priority

Priority Number:

201562131669 P

Priority Date:

11/03/2015

Priority Country:

United States (US)

Classification

IPC classification:

H01L 21/033; H01L 21/02; C23C 14/00;

Publication

European Patent Bulletin

Issue number:

202218

Publication date:

04/05/2022

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

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