Patent details

Basic Information

Publication number:

EP3862460

PCT Application Number:

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP211584230

PCT Publication Number:

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

French Title of Invention:

CIBLE DE PULVÉRISATION AVEC RAINURES DE REFROIDISSEMENT ARRIÈRE

German Title of Invention:

SPUTTERZIEL MIT RÜCKSEITIGEN KÜHLRILLEN

SPC Number:

Dates

Filing date:

14/08/2014

Grant date:

15/02/2023

EP Publication Date:

11/08/2021

PCT Publication Date:

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

15/02/2023

EP B1 Publication Date:

15/02/2023

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

14/08/2023

Expiration date:

14/08/2034

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

08/02/2023

 

 

Name:

Applied Materials, Inc.

Address:

3050 Bowers Avenue, Santa Clara, CA 95054, United States (US)

Inventor

1

Name:

Cox, Michael S.

Address:

United States (US)

2

Name:

West, Brian T.

Address:

United States (US)

3

Name:

Oh, Jeonghoon

Address:

United States (US)

Priority

Priority Number:

201361866006 P

Priority Date:

14/08/2013

Priority Country:

United States (US)

Classification

IPC classification:

C23C 14/34; H01J 37/34;

Publication

European Patent Bulletin

Issue number:

202307

Publication date:

15/02/2023

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages