Patent details
EP3117495 Title: LASER REPETITION RATE MULTIPLIER AND FLAT-TOP BEAM PROFILE GENERATORS USING MIRRORS AND/OR PRISMS
Basic Information
- Publication number:
- EP3117495
- PCT Application Number:
- US2015036374
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP158093765
- PCT Publication Number:
- WO2015195877
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- LASER REPETITION RATE MULTIPLIER AND FLAT-TOP BEAM PROFILE GENERATORS USING MIRRORS AND/OR PRISMS
- French Title of Invention:
- MULTIPLICATEUR DE FRÉQUENCE DE RÉPÉTITION LASER ET GÉNÉRATEURS DE PROFIL DE FAISCEAU UNIFORME UTILISANT DES MIROIRS ET/OU DES PRISMES
- German Title of Invention:
- LASERWIEDERHOLUNGSFREQUENZVERVIELFACHER UND FLACHE STRAHLPROFILGENERATOREN MIT SPIEGELN UND/ODER PRISMEN
- SPC Number:
Dates
- Filing date:
- 18/06/2015
- Grant date:
- 26/04/2023
- EP Publication Date:
- 18/01/2017
- PCT Publication Date:
- 23/12/2015
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 26/04/2023
- EP B1 Publication Date:
- 26/04/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 18/06/2023
- Expiration date:
- 18/06/2035
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 19/04/2023
- Name:
- Kla-Tencor Corporation
- Address:
- One Technology Drive, Milpitas, CA 95035, United States (US)
Inventor
1
- Name:
- LOIU, Justin Dianhuan
- Address:
- United States (US)
2
- Name:
- DENG, Yujun
- Address:
- United States (US)
3
- Name:
- LU, Xiaoxu
- Address:
- United States (US)
4
- Name:
- FIELDEN, John
- Address:
- United States (US)
5
- Name:
- CHUANG, Yung-Ho Alex
- Address:
- United States (US)
6
- Name:
- ARMSTRONG, J. Joseph
- Address:
- United States (US)
Priority
1
- Priority Number:
- 201462015016 P
- Priority Date:
- 20/06/2014
- Priority Country:
- United States (US)
2
- Priority Number:
- 201462038471 P
- Priority Date:
- 18/08/2014
- Priority Country:
- United States (US)
3
- Priority Number:
- 201514596738
- Priority Date:
- 14/01/2015
- Priority Country:
- United States (US)
Classification
Publication
European Patent Bulletin
- Issue number:
- 202317
- Publication date:
- 26/04/2023
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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