Patent details
EP3652778 Title: GAS DELIVERY SYSTEM FOR HIGH PRESSURE PROCESSING CHAMBER
Basic Information
- Publication number:
- EP3652778
- PCT Application Number:
- US2018037539
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP188318232
- PCT Publication Number:
- WO2019013920
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- GAS DELIVERY SYSTEM FOR HIGH PRESSURE PROCESSING CHAMBER
- French Title of Invention:
- SYSTÈME DE DISTRIBUTION DE GAZ POUR CHAMBRE DE TRAITEMENT À HAUTE PRESSION
- German Title of Invention:
- GASZUFUHRSYSTEM FÜR HOCHDRUCKPROZESSKAMMER
- SPC Number:
Dates
- Filing date:
- 14/06/2018
- Grant date:
- 09/08/2023
- EP Publication Date:
- 20/05/2020
- PCT Publication Date:
- 17/01/2019
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 09/08/2023
- EP B1 Publication Date:
- 09/08/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 14/06/2024
- Expiration date:
- 14/06/2038
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 02/08/2023
- Name:
- Micromaterials LLC
- Address:
- 2711 Centerville Road Suite 400, Wilmington, Delaware 19808, United States (US)
Inventor
1
- Name:
- LIANG, Qiwei
- Address:
- United States (US)
2
- Name:
- WONG, Keith Tatseun
- Address:
- United States (US)
3
- Name:
- MALIK, Sultan
- Address:
- United States (US)
4
- Name:
- KHAN, Adib
- Address:
- United States (US)
5
- Name:
- NEMANI, Srinivas D.
- Address:
- United States (US)
Priority
1
- Priority Number:
- 201762532715 P
- Priority Date:
- 14/07/2017
- Priority Country:
- United States (US)
2
- Priority Number:
- 201715835378
- Priority Date:
- 07/12/2017
- Priority Country:
- United States (US)
Classification
- IPC classification:
- H01L 21/67;
Publication
European Patent Bulletin
1
- Issue number:
- 202332
- Publication date:
- 09/08/2023
- Description:
- Grant (B1)
2
- Issue number:
- 202333
- Publication date:
- 16/08/2023
- Description:
- Application number/publication number of the divisional application (Art. 76) changed
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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