Patent details
EP3491167 Title: COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAINING FILMS
Basic Information
- Publication number:
- EP3491167
- PCT Application Number:
- US2017043890
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP178351821
- PCT Publication Number:
- WO2018022719
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAINING FILMS
- French Title of Invention:
- COMPOSITIONS ET PROCÉDÉS LES METTANT EN OEUVRE POUR FILMS CONTENANT DU SILICIUM DOPÉ AU CARBONE
- German Title of Invention:
- ZUSAMMENSETZUNGEN UND VERFAHREN MIT VERWENDUNG DAVON FÜR KOHLENSTOFFDOTIERTE SILICIUMHALTIGE FILME
- SPC Number:
Dates
- Filing date:
- 26/07/2017
- Grant date:
- 06/09/2023
- EP Publication Date:
- 05/06/2019
- PCT Publication Date:
- 01/02/2018
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 06/09/2023
- EP B1 Publication Date:
- 06/09/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 26/07/2024
- Expiration date:
- 26/07/2037
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 30/08/2023
- Name:
- Versum Materials US, LLC
- Address:
- 8555 S. River Parkway, Tempe, AZ 85284, United States (US)
Inventor
1
- Name:
- KIM, Moo-Sung
- Address:
- Korea (Republic) (KR)
2
- Name:
- MALLIKARJUNAN, Anupama
- Address:
- United States (US)
3
- Name:
- CHANDRA, Haripin
- Address:
- United States (US)
4
- Name:
- LEI, Xinjian
- Address:
- United States (US)
Priority
1
- Priority Number:
- 201662367260 P
- Priority Date:
- 27/07/2016
- Priority Country:
- United States (US)
2
- Priority Number:
- 201715654426
- Priority Date:
- 19/07/2017
- Priority Country:
- United States (US)
Classification
- IPC classification:
- H01L 21/02; C23C 16/34; C23C 16/36; C23C 16/455; C23C 16/40; C23C 16/30; C23C 16/56;
Publication
European Patent Bulletin
- Issue number:
- 202336
- Publication date:
- 06/09/2023
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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