Patent details

Basic Information

Publication number:

EP3408829

PCT Application Number:

US2017015223

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP177449295

PCT Publication Number:

WO2017132435

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

French Title of Invention:

APPAREIL AYANT DE MULTIPLES FAISCEAUX DE PARTICULES CHARGÉES

German Title of Invention:

VORRICHTUNG MIT MEHREREN GELADENEN TEILCHENSTRAHLEN

SPC Number:

Dates

Filing date:

27/01/2017

Grant date:

25/10/2023

EP Publication Date:

05/12/2018

PCT Publication Date:

03/08/2017

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

25/10/2023

EP B1 Publication Date:

25/10/2023

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

27/01/2024

Expiration date:

27/01/2037

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

18/10/2023

 

 

Name:

ASML Netherlands B.V.

Address:

De Run 6501, 5504 DR Veldhoven, Netherlands (NL)

Inventor

1

Name:

REN, Weiming

Address:

United States (US)

2

Name:

HU, Xuerang

Address:

United States (US)

3

Name:

CHEN, Zhongwei

Address:

United States (US)

4

Name:

LIU, Xuedong

Address:

United States (US)

Priority

Priority Number:

201662287626 P

Priority Date:

27/01/2016

Priority Country:

United States (US)

Classification

IPC classification:

G01N 23/2251; H01J 37/28; H01J 37/05; H01J 37/244;

Publication

European Patent Bulletin

Issue number:

202343

Publication date:

25/10/2023

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages