Patent details
EP3587525 Title: LOW OXIDE TRENCH DISHING CHEMICAL MECHANICAL POLISHING
Basic Information
- Publication number:
- EP3587525
- PCT Application Number:
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP191837053
- PCT Publication Number:
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- LOW OXIDE TRENCH DISHING CHEMICAL MECHANICAL POLISHING
- French Title of Invention:
- POLISSAGE MÉCANIQUE ET CHIMIQUE DE PLATS DANS UNE TRANCHÉE À FAIBLE DEGRÉ D'OXYDATION
- German Title of Invention:
- CHEMISCH-MECHANISCHES POLIEREN FÜR NIEDRIGES OXID-TRENCH-DISHING
- SPC Number:
Dates
- Filing date:
- 01/07/2019
- Grant date:
- 22/11/2023
- EP Publication Date:
- 01/01/2020
- PCT Publication Date:
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 22/11/2023
- EP B1 Publication Date:
- 22/11/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 01/07/2024
- Expiration date:
- 01/07/2039
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 15/11/2023
- Name:
- Versum Materials US, LLC
- Address:
- 8555 S. River Parkway, Tempe, AZ 85284, United States (US)
Inventor
1
- Name:
- ROSE, Joseph, D.
- Address:
- United States (US)
2
- Name:
- ZHOU, Hongjun
- Address:
- United States (US)
3
- Name:
- SHI, Xiaobo
- Address:
- United States (US)
4
- Name:
- O'NEILL, Mark, Leonard
- Address:
- United States (US)
5
- Name:
- MURELLA, Krishna, P.
- Address:
- United States (US)
Priority
1
- Priority Number:
- 201862692633 P
- Priority Date:
- 29/06/2018
- Priority Country:
- United States (US)
2
- Priority Number:
- 201862692639 P
- Priority Date:
- 29/06/2018
- Priority Country:
- United States (US)
3
- Priority Number:
- 201916450784
- Priority Date:
- 24/06/2019
- Priority Country:
- United States (US)
Classification
- IPC classification:
- C09G 1/02; H01L 21/3105;
Publication
European Patent Bulletin
- Issue number:
- 202347
- Publication date:
- 22/11/2023
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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