Patent details
EP3377942 Title: LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS
Basic Information
- Publication number:
- EP3377942
- PCT Application Number:
- EP2016073380
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP167873447
- PCT Publication Number:
- WO2017084797
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS
- French Title of Invention:
- APPAREIL LITHOGRAPHIQUE ET PROCÉDÉ DE FONCTIONNEMENT D'APPAREIL LITHOGRAPHIQUE
- German Title of Invention:
- LITHOGRAFISCHE VORRICHTUNG UND VERFAHREN ZUM BETRIEB EINER LITHOGRAFISCHEN VORRICHTUNG
- SPC Number:
Dates
- Filing date:
- 30/09/2016
- Grant date:
- 20/12/2023
- EP Publication Date:
- 26/09/2018
- PCT Publication Date:
- 26/05/2017
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 20/12/2023
- EP B1 Publication Date:
- 20/12/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 30/09/2024
- Expiration date:
- 30/09/2036
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 13/12/2023
- Name:
- ASML Netherlands B.V.
- Address:
- P.O. Box 324, 5500 AH Veldhoven, Netherlands (NL)
Inventor
1
- Name:
- BUTLER, Hans
- Address:
- Netherlands (NL)
2
- Name:
- DE WIT, Paul Corné Henri
- Address:
- Netherlands (NL)
3
- Name:
- KANEHARA, Junichi
- Address:
- Netherlands (NL)
4
- Name:
- VAN DER PASCH, Engelbertus Antonius Fransiscus
- Address:
- Netherlands (NL)
Priority
1
- Priority Number:
- 15195532
- Priority Date:
- 20/11/2015
- Priority Country:
- European Patent Office (EPO) (EP)
2
- Priority Number:
- 16157155
- Priority Date:
- 24/02/2016
- Priority Country:
- European Patent Office (EPO) (EP)
Classification
- IPC classification:
- G03F 7/20;
Publication
European Patent Bulletin
- Issue number:
- 202351
- Publication date:
- 20/12/2023
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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