Patent details

Basic Information

Publication number:

EP3890002

PCT Application Number:

JP2019043353

Type:

European Patent Granted for LU

Legal Status:

In force

Application number:

EP199025883

PCT Publication Number:

WO2020137173

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

SUBSTRATE ANALYZING METHOD AND SUBSTRATE ANALYZING DEVICE

French Title of Invention:

PROCÉDÉ D'ANALYSE DE SUBSTRAT ET DISPOSITIF D'ANALYSE DE SUBSTRAT

German Title of Invention:

SUBSTRATANALYSEVERFAHREN UND SUBSTRATANALYSEVORRICHTUNG

SPC Number:

Dates

Filing date:

06/11/2019

Grant date:

24/01/2024

EP Publication Date:

06/10/2021

PCT Publication Date:

02/07/2020

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

24/01/2024

EP B1 Publication Date:

24/01/2024

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

Expiration date:

06/11/2039

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

17/01/2024

 

 

Name:

Ias Inc.

Address:

2-1, Hinohommachi 2-chome, Hino-shi, Tokyo 191-0011, Japan (JP)

Inventor

1

Name:

KAWABATA, Katsuhiko

Address:

Japan (JP)

2

Name:

LEE, Sungjae

Address:

Japan (JP)

3

Name:

HAYASHI, Takuma

Address:

Japan (JP)

Priority

Priority Number:

2018242929

Priority Date:

26/12/2018

Priority Country:

Japan (JP)

Classification

IPC classification:

H01L 21/66; G01N 1/28; G01N 1/32; G01N 21/94; G01N 21/95; G01N 35/10;

Publication

European Patent Bulletin

Issue number:

202404

Publication date:

24/01/2024

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

02/06/2025

Annual Fee Number:

6

Annual Fee Amount:

66 Euro

Penalty Fee Amount:

20 Euro

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages