Patent details
EP3440511 Title: PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION
Basic Information
- Publication number:
- EP3440511
- PCT Application Number:
- US2016060626
- Type:
- European Patent Granted for LU
- Legal Status:
- In force
- Application number:
- EP168981397
- PCT Publication Number:
- WO2017176314
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION
- French Title of Invention:
- AMÉLIORATION DE COMPATIBILITÉ DE TRAITEMENT PAR MODULATION DE FACTEUR DE REMPLISSAGE
- German Title of Invention:
- VERBESSERUNG DER PROZESSKOMPATIBILITÄT DURCH FÜLLFAKTORMODULATION
- SPC Number:
Dates
- Filing date:
- 04/11/2016
- Grant date:
- 06/03/2024
- EP Publication Date:
- 13/02/2019
- PCT Publication Date:
- 12/10/2017
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 06/03/2024
- EP B1 Publication Date:
- 06/03/2024
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- Expiration date:
- 04/11/2036
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 28/02/2024
- Name:
- KLA-Tencor Corporation
- Address:
- One Technology Drive, Milpitas, California 95035, United States (US)
Inventor
1
- Name:
- MANASSEN, Amnon
- Address:
- Germany (DE)
2
- Name:
- PASKOVER, Yuri
- Address:
- United States (US)
3
- Name:
- LUBASHEVSKY, Yuval
- Address:
- Germany (DE)
4
- Name:
- AHARON, Sharon
- Address:
- Israel (IL)
5
- Name:
- ITZKOVICH, Tal
- Address:
- Israel (IL)
6
- Name:
- LEE, Myungjun
- Address:
- Germany (DE)
7
- Name:
- SMITH, Mark D
- Address:
- Germany (DE)
8
- Name:
- HAJAJ, Eitan
- Address:
- Israel (IL)
9
- Name:
- NEGRI, Daria
- Address:
- Germany (DE)
10
- Name:
- LEVINSKI, Vladimir
- Address:
- Israel (IL)
11
- Name:
- ADEL, Michael E.
- Address:
- Israel (IL)
Priority
- Priority Number:
- 201662318086 P
- Priority Date:
- 04/04/2016
- Priority Country:
- United States (US)
Classification
- IPC classification:
- G03F 7/20; G03F 7/00; H01L 21/027; H01L 21/66;
Publication
European Patent Bulletin
- Issue number:
- 202410
- Publication date:
- 06/03/2024
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- 02/06/2025
- Annual Fee Number:
- 9
- Annual Fee Amount:
- 115 Euro
- Penalty Fee Amount:
- 20 Euro
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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