Patent details

Basic Information

Publication number:

EP3594988

PCT Application Number:

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP191836824

PCT Publication Number:

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

HIGH PERFORMANCE INSPECTION SCANNING ELECTRON MICROSCOPE DEVICE AND METHOD OF OPERATING THE SAME

French Title of Invention:

MICROSCOPE ÉLECTRONIQUE À BALAYAGE À HAUTE PERFORMANCE POUR INSPECTION ET SON PROCÉDÉ DE FONCTIONNEMENT

German Title of Invention:

HOCHLEISTUNGSFÄHIGE RASTERELEKTRONENMIKROSKOPVORRICHTUNG FÜR INSPEKTION UND VERFAHREN ZUM BETRIEB DAVON

SPC Number:

Dates

Filing date:

01/07/2019

Grant date:

01/01/2025

EP Publication Date:

15/01/2020

PCT Publication Date:

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

01/01/2025

EP B1 Publication Date:

01/01/2025

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

01/07/2025

Expiration date:

01/07/2039

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

25/12/2024

 

 

Name:

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH

Address:

Ammerthalstrasse 20, 85551 Heimstetten, Germany (DE)

Inventor

Name:

Adamec, Pavel

Address:

Germany (DE)

Priority

Priority Number:

201816033987

Priority Date:

12/07/2018

Priority Country:

United States (US)

Classification

IPC classification:

H01J 37/28; H01J 37/09; H01J 37/141; H01J 37/317;

Publication

European Patent Bulletin

Issue number:

202501

Publication date:

01/01/2025

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

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