Patent details

EP1570522 Title: SELF ALIGNED SHALLOW TRENCH ISOLATION WITH IMPROVED COUPLING COEFFICIENT IN FLOATING GATE DEVICES

Basic Information

Publication number:
EP1570522
PCT Application Number:
PCT/IB/2003/004949
Type:
European Patent Granted for LU
Legal Status:
Lapsed
Application number:
EP037697398
PCT Publication Number:
WO/2004/053992
First applicant's nationality:
Translation Language:
EPO Publication Language:
English
English Title of Invention:
SELF ALIGNED SHALLOW TRENCH ISOLATION WITH IMPROVED COUPLING COEFFICIENT IN FLOATING GATE DEVICES
French Title of Invention:
ISOLEMENT DE TRANCHEES PEU PROFONDES A AUTOALIGNEMENT PRESENTANT UN COEFFICIENT DE COUPLAGE AMELIORE DANS DES DISPOSITIFS A GRILLE FLOTTANTE
German Title of Invention:
SELBSTAUSGERICHTETE SEICHTE GRABENISOLATION MIT VERBESSERTEM KOPPELKOEFFIZIENTEN IN FLOATING-GATE-BAUELEMENTEN
SPC Number:

Dates

Filing date:
31/10/2003
Grant date:
12/12/2012
EP Publication Date:
12/12/2012
PCT Publication Date:
24/06/2004
Claims Translation Received Date:
Translations Received Date (B1 EP Publication):
Translations Received Date (B2 EP Publication):
Translations Received Date (B3 EP Publication):
Publication date:
07/09/2005
EP B1 Publication Date:
12/12/2012
EP B2 Publication Date:
EP B3 Publication Date:
Lapsed date:
31/10/2013
Expiration date:
31/10/2023
Renunciation date:
Revocation date:
Annulment date:

Owner

From:
31/10/2003
 
 

Name:
NXP B.V.
Address:
High Tech Campus 60, 5656 AG Eindhoven, Netherlands (NL)

Inventor

1

Name:
VAN SCHAIJK Robertus, T., F.
Address:
Netherlands (NL)

2

Name:
VAN DUUREN Michiel, J.
Address:
Netherlands (NL)

Priority

Priority Number:
02080070
Priority Date:
06/12/2002
Priority Country:
European Patent Office (EPO) (EP)

Classification

Main IPC Class:
H01L 27/115;
Filing date Document type Number of pages