Patent details

Basic Information

Publication number:

EP1598855

PCT Application Number:

PCT/JP/2004/002295

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP047149109

PCT Publication Number:

WO/2004/086468

First applicant's nationality:

Translation Language:

EPO Publication Language:

Not available

English Title of Invention:

EXPOSURE APPARATUS AND METHOD, AND METHOD OF PRODUCING APPARATUS

French Title of Invention:

APPAREIL ET PROCEDE D'EXPOSITION, PROCEDE DE PRODUCTION DE L'APPAREIL

German Title of Invention:

BELICHTUNGSVORRICHTUNG UND VERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG

SPC Number:

Dates

Filing date:

26/02/2004

Grant date:

22/04/2015

EP Publication Date:

22/04/2015

PCT Publication Date:

07/10/2004

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

23/11/2005

EP B1 Publication Date:

22/04/2015

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

26/02/2016

Expiration date:

26/02/2024

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

01/08/2015

 

 

Name:

Nikon Corporation

Address:

15-3, Konan 2-chome Minato-ku, Tokyo 108-6290, Japan (JP)

Inventor

1

Name:

Nagasaka Hiroyuki

Address:

Japan (JP)

2

Name:

Owa Soichi

Address:

Japan (JP)

3

Name:

Nishii Yasufumi

Address:

Japan (JP)

Priority

1

Priority Number:

2003049365

Priority Date:

26/02/2003

Priority Country:

Japan (JP)

2

Priority Number:

2003110748

Priority Date:

15/04/2003

Priority Country:

Japan (JP)

3

Priority Number:

2003320100

Priority Date:

11/09/2003

Priority Country:

Japan (JP)

Classification

Main IPC Class:

H01L 21/027;

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages