Patent details
EP1646913 Title: METHODS FOR INSPECTION OF WAFERS AND RETICLES USING DESIGNER INTENT DATA
Basic Information
- Publication number:
- EP1646913
- PCT Application Number:
- PCT/US/2004/021459
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP047775309
- PCT Publication Number:
- WO/2005/008747
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- METHODS FOR INSPECTION OF WAFERS AND RETICLES USING DESIGNER INTENT DATA
- French Title of Invention:
- PROCEDES POUR VERIFIER DES PLAQUETTES ET DES RETICULES AU MOYEN DE DONNEES INTENTIONNELLES DE CONCEPTEUR
- German Title of Invention:
- VERFAHREN ZUR INSPEKTION VON WAFERN UND RETIKELN UNTER VERWENDUNG VON ENTWICKLER-ABSICHTSDATEN
- SPC Number:
Dates
- Filing date:
- 02/07/2004
- Grant date:
- 25/03/2009
- EP Publication Date:
- 25/03/2009
- PCT Publication Date:
- 27/01/2005
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 19/04/2006
- EP B1 Publication Date:
- 25/03/2009
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 02/07/2009
- Expiration date:
- 02/07/2024
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 14/05/2009
- Name:
- KLA-Tencor Corporation
- Address:
- One Technology Drive, Milpitas, CA 95035, United States (US)
Inventor
1
- Name:
- VOLK William
- Address:
- United States (US)
2
- Name:
- KEKARE Sagar A.
- Address:
- United States (US)
3
- Name:
- HESS Carl
- Address:
- United States (US)
4
- Name:
- WILEY James
- Address:
- United States (US)
5
- Name:
- MCCAULEY Sharon
- Address:
- United States (US)
6
- Name:
- WATSON Sterling
- Address:
- United States (US)
7
- Name:
- MARELLA Paul Frank
- Address:
- United States (US)
8
- Name:
- CHANG Ellis
- Address:
- United States (US)
Priority
1
- Priority Number:
- 485338 P
- Priority Date:
- 03/07/2003
- Priority Country:
- United States (US)
2
- Priority Number:
- 883372
- Priority Date:
- 01/07/2004
- Priority Country:
- United States (US)
Classification
- Main IPC Class:
- G03F 1/00;
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