Patent details
EP1713113 Title: STAGE DRIVE METHOD AND STAGE DRIVE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD
Basic Information
- Publication number:
- EP1713113
- PCT Application Number:
- PCT/JP/2005/001076
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP057041824
- PCT Publication Number:
- WO/2005/074014
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- Not available
- English Title of Invention:
- STAGE DRIVE METHOD AND STAGE DRIVE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD
- French Title of Invention:
- PROCEDE D'ENTRAINEMENT D'UN SUPPORT MOBILE ET APPAREIL D'ENTRAINEMENT DU SUPPORT, APPAREIL D'EXPOSITION ET PROCEDE DE FABRICATION D'UN DISPOSITIF
- German Title of Invention:
- BÜHNENANTRIEBSVERFAHREN UND BÜHNENANTRIEBSVORRICHTUNG, BELICHTUNGSVORRICHTUNG UND BAUELEMENTE-HERSTELLUNGSVERFAHREN
- SPC Number:
Dates
- Filing date:
- 27/01/2005
- Grant date:
- 29/12/2010
- EP Publication Date:
- 29/12/2010
- PCT Publication Date:
- 11/08/2005
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 18/10/2006
- EP B1 Publication Date:
- 29/12/2010
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 27/01/2011
- Expiration date:
- 27/01/2025
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 27/01/2005
- Name:
- NIKON CORPORATION
- Address:
- 12-1, Yurakucho 1-chome, Chiyoda-ku Tokyo 100-8331, Japan (JP)
Inventor
- Name:
- SHIBAZAKI Yuichi
- Address:
- Japan (JP)
Priority
1
- Priority Number:
- 2004025837
- Priority Date:
- 02/02/2004
- Priority Country:
- Japan (JP)
2
- Priority Number:
- 2004300566
- Priority Date:
- 14/10/2004
- Priority Country:
- Japan (JP)
Classification
- Main IPC Class:
- H01L 21/027;
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