Patent details

Basic Information

Publication number:

EP2188411

PCT Application Number:

PCT/IB/2008/053354

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP088073903

PCT Publication Number:

WO/2009/027905

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

SPUTTERING SYSTEM

French Title of Invention:

SYSTÈME DE PULVÉRISATION CATHODIQUE

German Title of Invention:

SPUTTERSYSTEM

SPC Number:

Dates

Filing date:

21/08/2008

Grant date:

26/10/2011

EP Publication Date:

26/10/2011

PCT Publication Date:

05/03/2009

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

26/05/2010

EP B1 Publication Date:

26/10/2011

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

21/08/2012

Expiration date:

21/08/2028

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

21/08/2008

 

 

Name:

Koninklijke Philips Electronics N.V.

Address:

Groenewoudseweg 1, 5621 BA Eindhoven, Netherlands (NL)

Name:

Philips Intellectual Property & Standards GmbH

Address:

Steindamm 94, 20099 Hamburg, Germany (DE)

Inventor

1

Name:

DIEDERICH Thomas

Address:

Netherlands (NL)

2

Name:

RUSKE Manfred

Address:

Netherlands (NL)

3

Name:

HENNINGER Georg

Address:

Netherlands (NL)

4

Name:

HUNSCHE Berno

Address:

Netherlands (NL)

5

Name:

SELL Konrad

Address:

Netherlands (NL)

Priority

Priority Number:

07115308

Priority Date:

30/08/2007

Priority Country:

European Patent Office (EPO) (EP)

Classification

Main IPC Class:

C23C 14/34;

Filing date	Document type	Number of pages