Patent details

Basic Information

Publication number:

EP2304769

PCT Application Number:

PCT/EP/2010/002213

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP107141889

PCT Publication Number:

WO/2010/115632

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

METHOD FOR AUTOMATIC MEASUREMENT AND FOR TEACHING-IN OF LOCATION POSITIONS OF OBJECTS WITHIN A SUBSTRATE PROCESSING SYSTEM BY MEANS OF SENSOR CARRIERS AND ASSOCIATED SENSOR CARRIER

French Title of Invention:

PROCÉDÉ DE MESURE AUTOMATIQUE ET D'APPRENTISSAGE DE POSITIONS DE LOCALISATION D'OBJETS DANS UN SYSTÈME DE TRAITEMENT DE SUBSTRAT AU MOYEN DE SUPPORTS DE CAPTEURS ET D'UN SUPPORT DE CAPTEUR ASSOCIÉ

German Title of Invention:

VERFAHREN ZUR AUTOMATISCHEN MESSUNG UND MELDUNG VON POSITIONSINFORMATIONEN ÜBER OBJEKTE IN EINEM SUBSTRATVERARBEITUNGSSYSTEM MITHILFE VON SENSORTRÄGERN SOWIE ENTSPRECHENDER SENSORTRÄGER

SPC Number:

Dates

Filing date:

09/04/2010

Grant date:

27/11/2013

EP Publication Date:

27/11/2013

PCT Publication Date:

14/10/2010

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

06/04/2011

EP B1 Publication Date:

27/11/2013

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

09/04/2014

Expiration date:

09/04/2030

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

09/04/2010

 

 

Name:

Aes Motomation GmbH

Address:

Nikolaus-Otto-Strasse 8, 40670 Meerbusch, Germany (DE)

Inventor

1

Name:

WALTNER Paul

Address:

Germany (DE)

2

Name:

HERTGENS Andreas

Address:

Germany (DE)

3

Name:

MUELLER Torsten

Address:

Germany (DE)

Priority

Priority Number:

102009016811

Priority Date:

09/04/2009

Priority Country:

Germany (DE)

Classification

Main IPC Class:

H01L 21/67;

Filing date	Document type	Number of pages