Patent details
EP2309559
Title:
Piezoelectric actuating structure comprising an integrated piezoresistive strain gauge and manufacturing method thereof
Basic Information
- Publication number:
- EP2309559
- PCT Application Number:
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP101863579
- PCT Publication Number:
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- French
- English Title of Invention:
- Piezoelectric actuating structure comprising an integrated piezoresistive strain gauge and manufacturing method thereof
- French Title of Invention:
- Structure d'actionnement piézoélectrique comportant une jauge de contrainte piézorésistive intégrée et son procédé de réalisation
- German Title of Invention:
- Piezoelektrische Erregerstruktur mit integriertem piezoresistivem Dehnmessstreifen und Herstellungsverfahren dafür
- SPC Number:
-
Dates
- Filing date:
- 04/10/2010
- Grant date:
- 29/05/2013
- EP Publication Date:
- 29/05/2013
- PCT Publication Date:
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 13/04/2011
- EP B1 Publication Date:
- 29/05/2013
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 04/10/2013
- Expiration date:
- 04/10/2030
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 04/10/2010
-
-
- Name:
- COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Address:
- BÂTIMENT "LE PONANT D" 25, RUE LEBLANC, 75015 PARIS, France (FR)
Inventor
1
- Name:
- Perruchot François
- Address:
- France (FR)
2
- Name:
- Cueff Matthieu
- Address:
- France (FR)
3
- Name:
- Defay Emmanuel
- Address:
- France (FR)
4
- Name:
- Rey Patrice
- Address:
- France (FR)
Priority
- Priority Number:
- 0904774
- Priority Date:
- 06/10/2009
- Priority Country:
- France (FR)
Classification
- Main IPC Class:
-
H01L 41/314;
Filing date |
Document type |
Number of pages |