Patent details
EP2449576 Title: SUBSTRATE PROCESSING SYSTEM
Basic Information
- Publication number:
- EP2449576
- PCT Application Number:
- PCT/EP/2009/062845
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP097368831
- PCT Publication Number:
- WO/2011/000442
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- SUBSTRATE PROCESSING SYSTEM
- French Title of Invention:
- SYSTÈME DE TRAITEMENT DE SUBSTRAT
- German Title of Invention:
- SUBSTRATVERARBEITUNGSSYSTEM
- SPC Number:
Dates
- Filing date:
- 02/10/2009
- Grant date:
- 25/01/2017
- EP Publication Date:
- 25/01/2017
- PCT Publication Date:
- 06/01/2011
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 09/05/2012
- EP B1 Publication Date:
- 25/01/2017
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 02/10/2017
- Expiration date:
- 02/10/2029
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 02/10/2009
- Name:
- Applied Materials Inc.
- Address:
- 3050 Bowers Avenue, Santa Clara, CA 95054, United States (US)
Inventor
1
- Name:
- VERCESI Tommaso
- Address:
- Italy (IT)
2
- Name:
- BACCINI Andrea
- Address:
- Italy (IT)
3
- Name:
- GALIAZZO Marco
- Address:
- Italy (IT)
Priority
- Priority Number:
- UD20090129
- Priority Date:
- 03/07/2009
- Priority Country:
- Italy (IT)
Classification
- Main IPC Class:
- H01L 21/67;
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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