Patent details
EP2462486 Title: OBJECT INSPECTION SYSTEMS AND METHODS
Basic Information
- Publication number:
- EP2462486
- PCT Application Number:
- EP2010059460
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP107286668
- PCT Publication Number:
- WO2011015412
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- OBJECT INSPECTION SYSTEMS AND METHODS
- French Title of Invention:
- PROCÉDÉS ET SYSTEMES POUR L'INSPECTION D'OBJETS
- German Title of Invention:
- VERFAHREN UND SYSTEME ZUR INSPEKTION VON GEGENSTÄNDEN
- SPC Number:
Dates
- Filing date:
- 02/07/2010
- Grant date:
- 15/04/2020
- EP Publication Date:
- 13/06/2012
- PCT Publication Date:
- 10/02/2011
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 15/04/2020
- EP B1 Publication Date:
- 15/04/2020
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 02/07/2020
- Expiration date:
- 02/07/2030
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 08/04/2020
- Name:
- ASML Netherlands BV
- Address:
- De Run 6501, 5504 DR Veldhoven, Netherlands (NL)
Inventor
1
- Name:
- BANINE, Vadim
- Address:
- Netherlands (NL)
2
- Name:
- IOSAD, Nikolay
- Address:
- Netherlands (NL)
3
- Name:
- DEN BOEF, Arie
- Address:
- Netherlands (NL)
4
- Name:
- IVANOV, Vitalii
- Address:
- Poland (PL)
5
- Name:
- SCACCABAROZZI, Luigi
- Address:
- Netherlands (NL)
Priority
- Priority Number:
- 231161 P
- Priority Date:
- 04/08/2009
- Priority Country:
- United States (US)
Classification
- IPC classification:
- G01N 21/64; G01N 21/65; G01N 21/94; G01N 21/95; G01N 21/956; G03F 1/00; G03F 1/24; G03F 1/84;
Publication
European Patent Bulletin
- Issue number:
- 202016
- Publication date:
- 15/04/2020
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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