Patent details

Basic Information

Publication number:

EP2555234

PCT Application Number:

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP121710016

PCT Publication Number:

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

French Title of Invention:

Dispositif de maintien électrostatique, appareil lithographique et procédé de fabrication d'un dispositif de maintien électrostatique

German Title of Invention:

Elektrostatische Klemme, lithografische Vorrichtung und Verfahren zur Herstellung einer elektrostatischen Klemme

SPC Number:

Dates

Filing date:

06/06/2012

Grant date:

19/08/2020

EP Publication Date:

06/02/2013

PCT Publication Date:

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

19/08/2020

EP B1 Publication Date:

19/08/2020

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

06/06/2021

Expiration date:

06/06/2032

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

12/08/2020

 

 

Name:

ASML Holding N.V.

Address:

De Run 6501, 5504 DR Veldhoven, Netherlands (NL)

Inventor

1

Name:

Deng, Jianguo

Address:

United States (US)

2

Name:

Wilklow, Ronald

Address:

United States (US)

3

Name:

Helmus, Peter

Address:

United States (US)

Priority

Priority Number:

201161514320 P

Priority Date:

02/08/2011

Priority Country:

United States (US)

Classification

IPC classification:

G03F 7/20; H01L 21/683;

Publication

European Patent Bulletin

Issue number:

202034

Publication date:

19/08/2020

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages