Patent details
EP2587529 Title: SUCTION APPARATUS, SEMICONDUCTOR DEVICE OBSERVATION DEVICE, AND SEMICONDUCTOR DEVICE OBSERVATION METHOD
Basic Information
- Publication number:
- EP2587529
- PCT Application Number:
- JP2011064172
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP117981456
- PCT Publication Number:
- WO2011162261
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- SUCTION APPARATUS, SEMICONDUCTOR DEVICE OBSERVATION DEVICE, AND SEMICONDUCTOR DEVICE OBSERVATION METHOD
- French Title of Invention:
- APPAREIL D'ASPIRATION, ET DISPOSITIF ET PROCÉDÉ POUR L'OBSERVATION D'UN DISPOSITIF SEMI-CONDUCTEUR
- German Title of Invention:
- SAUGVORRICHTUNG, VORRICHTUNG ZUR ÜBERWACHUNG EINES HALBLEITERBAUELEMENTS UND VERFAHREN ZUR ÜBERWACHUNG EINES HALBLEITERBAUELEMENTS
- SPC Number:
Dates
- Filing date:
- 21/06/2011
- Grant date:
- 17/01/2018
- EP Publication Date:
- 01/05/2013
- PCT Publication Date:
- 29/12/2011
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 17/01/2018
- EP B1 Publication Date:
- 17/01/2018
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 21/06/2018
- Expiration date:
- 21/06/2031
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 10/01/2018
- Name:
- Hamamatsu Photonics K.K.
- Address:
- 1126-1, Ichino-cho Higashi-ku, Hamamatsu-shi, Shizuoka 435-8558, Japan (JP)
Inventor
1
- Name:
- MATSUURA Hiroyuki
- Address:
- Japan (JP)
2
- Name:
- TERADA Hirotoshi
- Address:
- Japan (JP)
Priority
- Priority Number:
- 2010142868
- Priority Date:
- 23/06/2010
- Priority Country:
- Japan (JP)
Classification
- IPC classification:
- G01N 21/95; H01L 21/66; H01L 21/683; H01L 21/687;
Publication
European Patent Bulletin
- Issue number:
- 201803
- Publication date:
- 17/01/2018
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
| Filing date | Document type | Number of pages |
|---|---|---|
| 30/10/2018 | Outgoing Correspondence | 1 |