Patent details
EP2608872 Title: METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
Basic Information
- Publication number:
- EP2608872
- PCT Application Number:
- US2011048754
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP118204973
- PCT Publication Number:
- WO2012027330
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
- French Title of Invention:
- PROCÉDÉ ET APPAREIL DE TRAITEMENT PAR FAISCEAU NEUTRE BASÉS SUR LA TECHNOLOGIE DES FAISCEAUX IONIQUES D'AGRÉGATS GAZEUX
- German Title of Invention:
- VERFAHREN UND VORRICHTUNG FÜR NEUTRALE STRAHLENVERARBEITUNG AUF BASIS EINER CLUSTER-IONENSTRAHL-TECHNOLOGIE
- SPC Number:
Dates
- Filing date:
- 23/08/2011
- Grant date:
- 31/07/2019
- EP Publication Date:
- 03/07/2013
- PCT Publication Date:
- 01/03/2012
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 31/07/2019
- EP B1 Publication Date:
- 31/07/2019
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 23/08/2019
- Expiration date:
- 23/08/2031
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 24/07/2019
- Name:
- Exogenesis Corporation
- Address:
- 20 Fortune Drive, Billerica, Massachusetts 01821, United States (US)
Inventor
1
- Name:
- KIRKPATRICK, Sean, R.
- Address:
- United States (US)
2
- Name:
- KIRKPATRICK, Allen, R.
- Address:
- United States (US)
Priority
1
- Priority Number:
- 37622510 P
- Priority Date:
- 23/08/2010
- Priority Country:
- United States (US)
2
- Priority Number:
- 201161473359 P
- Priority Date:
- 08/04/2011
- Priority Country:
- United States (US)
3
- Priority Number:
- 201161484421 P
- Priority Date:
- 10/05/2011
- Priority Country:
- United States (US)
4
- Priority Number:
- 201161490675 P
- Priority Date:
- 27/05/2011
- Priority Country:
- United States (US)
Classification
- IPC classification:
- H01J 37/05; H01J 37/317; H01L 21/02; H01L 21/265; H01L 21/311; H05H 3/00;
Publication
European Patent Bulletin
- Issue number:
- 201931
- Publication date:
- 31/07/2019
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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