Patent details
EP2669931 Title: DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD
Basic Information
- Publication number:
- EP2669931
- PCT Application Number:
- JP2012000548
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP127391894
- PCT Publication Number:
- WO2012102060
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD
- French Title of Invention:
- SYSTÈME DE COMMANDE ET PROCÉDÉ DE COMMANDE, DISPOSITIF D'EXPOSITION LUMINEUSE ET PROCÉDÉ D'EXPOSITION LUMINEUSE, ET PROCÉDÉ DE CONCEPTION DE SYSTÈME DE COMMANDE
- German Title of Invention:
- ANTRIEBSSYSTEM UND ANTRIEBSVERFAHREN, BELICHTUNGSVORRICHTUNG UND BELICHTUNGSVERFAHREN SOWIE VERFAHREN ZUM ENTWURF DES ANTRIEBSSYSTEMS
- SPC Number:
Dates
- Filing date:
- 27/01/2012
- Grant date:
- 15/04/2020
- EP Publication Date:
- 04/12/2013
- PCT Publication Date:
- 02/08/2012
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 15/04/2020
- EP B1 Publication Date:
- 15/04/2020
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 27/01/2021
- Expiration date:
- 27/01/2032
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 08/04/2020
- Name:
- Nikon Corporation
- Address:
- 15-3, Konan 2-chome Minato-ku, Tokyo 108-6290, Japan (JP)
- Name:
- The University of Tokyo
- Address:
- 3-1, Hongo 7-chome, Bunkyo-ku, Tokyo 113-8654, Japan (JP)
Inventor
1
- Name:
- SAIKI, Kazuaki
- Address:
- Japan (JP)
2
- Name:
- SAKATA, Koichi
- Address:
- Japan (JP)
3
- Name:
- FUJIMOTO, Hiroshi
- Address:
- Japan (JP)
Priority
- Priority Number:
- 2011017265
- Priority Date:
- 28/01/2011
- Priority Country:
- Japan (JP)
Classification
- IPC classification:
- G03F 7/20;
Publication
European Patent Bulletin
- Issue number:
- 202016
- Publication date:
- 15/04/2020
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
| Filing date | Document type | Number of pages |
|---|