Patent details

Basic Information

Publication number:

EP2690496

PCT Application Number:

PCT/CN/2012/072693

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP127613115

PCT Publication Number:

WO/2012/126364

First applicant's nationality:

Translation Language:

EPO Publication Language:

Not available

English Title of Invention:

METHOD FOR MEASURING DISTORTION OF PROJECTION OBJECTIVE

French Title of Invention:

PROCÉDÉ PERMETTANT DE MESURER UNE DISTORSION D'UN OBJECTIF DE PROJECTION

German Title of Invention:

VERFAHREN ZUR MESSUNG DER VERZERRUNG VON PROJEKTIONSOBJEKTIVEN

SPC Number:

Dates

Filing date:

21/03/2012

Grant date:

17/08/2016

EP Publication Date:

17/08/2016

PCT Publication Date:

27/09/2012

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

29/01/2014

EP B1 Publication Date:

17/08/2016

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

21/03/2017

Expiration date:

21/03/2032

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

21/03/2012

 

 

Name:

Shanghai Micro Electronics Equipment Co. Ltd.

Address:

1525 Zhangdong Road Pudong New Area, Shanghai 201203, China (CN)

Inventor

1

Name:

FANG Li

Address:

China (CN)

2

Name:

SUN Gang

Address:

China (CN)

3

Name:

MIN Jinhua

Address:

China (CN)

4

Name:

ZHANG Jun

Address:

China (CN)

Priority

Priority Number:

201110068060

Priority Date:

21/03/2011

Priority Country:

China (CN)

Classification

Main IPC Class:

G03F 7/20;

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages