Patent details
EP2714807 Title: COMPOSITION FOR METAL ELECTROPLATING COMPRISING AN ADDITIVE FOR BOTTOM-UP FILLING OF THOUGH SILICON VIAS AND INTERCONNECT FEATURES
Basic Information
- Publication number:
- EP2714807
- PCT Application Number:
- IB2012052727
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP127920593
- PCT Publication Number:
- WO2012164509
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- COMPOSITION FOR METAL ELECTROPLATING COMPRISING AN ADDITIVE FOR BOTTOM-UP FILLING OF THOUGH SILICON VIAS AND INTERCONNECT FEATURES
- French Title of Invention:
- COMPOSITION POUR UN ÉLECTROPLAQUAGE MÉTALLIQUE COMPRENANT UN ADDITIF POUR UN REMPLISSAGE DE HAUT EN BAS DE TROUS TRAVERSANT LE SILICIUM ET CARACTÉRISTIQUES D'INTERCONNEXION
- German Title of Invention:
- ZUSAMMENSETZUNG ZUR METALLGALVANISIERUNG MIT EINEM ZUSATZSTOFF ZUR AUFFÜLLUNG DURCH SILICIUMDURCHGÄNGE UND VERBINDUNGSFUNKTIONEN
- SPC Number:
Dates
- Filing date:
- 31/05/2012
- Grant date:
- 02/01/2019
- EP Publication Date:
- 09/04/2014
- PCT Publication Date:
- 06/12/2012
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 02/01/2019
- EP B1 Publication Date:
- 02/01/2019
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 31/05/2019
- Expiration date:
- 31/05/2032
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 26/12/2018
- Name:
- BASF SE
- Address:
- Carl-Bosch-Strasse 38, 67056 Ludwigshafen am Rhein, Germany (DE)
Inventor
1
- Name:
- ARNOLD, Marco
- Address:
- Germany (DE)
2
- Name:
- RÖGER-GÖPFERT, Cornelia
- Address:
- Germany (DE)
3
- Name:
- MAYER, Dieter
- Address:
- Germany (DE)
4
- Name:
- FLÜGEL, Alexander
- Address:
- Germany (DE)
5
- Name:
- EMNET, Charlotte
- Address:
- Germany (DE)
6
- Name:
- RAETHER, Roman, Benedikt
- Address:
- Germany (DE)
Priority
- Priority Number:
- 201161491935 P
- Priority Date:
- 01/06/2011
- Priority Country:
- United States (US)
Classification
- IPC classification:
- C08G 73/02; C08L 79/02; C23C 18/38; C25D 3/38; C25D 7/12; H01L 21/288; H01L 21/768;
Publication
European Patent Bulletin
- Issue number:
- 201901
- Publication date:
- 02/01/2019
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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