Patent details

Basic Information

Publication number:

EP2764408

PCT Application Number:

EP2012068386

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP127664092

PCT Publication Number:

WO2013050243

First applicant's nationality:

Translation Language:

EPO Publication Language:

English

English Title of Invention:

CHUCK, LITHOGRAPHY APPARATUS AND METHOD OF USING A CHUCK

French Title of Invention:

PORTE-SUBSTRAT, APPAREIL DE LITHOGRAPHIE ET PROCÉDÉ D'UTILISATION D'UN PORTE-SUBSTRAT

German Title of Invention:

HALTEVORRICHTUNG, LITHOGRAPHIEVORRICHTUNG UND VERFAHREN ZUR VERWENDUNG DER HALTEVORRICHTUNG

SPC Number:

Dates

Filing date:

19/09/2012

Grant date:

21/08/2019

EP Publication Date:

13/08/2014

PCT Publication Date:

11/04/2013

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

21/08/2019

EP B1 Publication Date:

21/08/2019

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

19/09/2019

Expiration date:

19/09/2032

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

14/08/2019

 

 

Name:

ASML Netherlands B.V.

Address:

P.O. Box 324, 5500 AH Veldhoven, Netherlands (NL)

Inventor

1

Name:

NOTENBOOM, Arnoud

Address:

Netherlands (NL)

2

Name:

GILISSEN, Noud

Address:

Netherlands (NL)

3

Name:

SIJBEN, Anko

Address:

Netherlands (NL)

4

Name:

WILL, Manon, Elise

Address:

Netherlands (NL)

5

Name:

SCHMITZ, Roger, Wilhelmus, Antonius, Henricus

Address:

Netherlands (NL)

6

Name:

CORNELISSEN, Bas

Address:

Netherlands (NL)

7

Name:

VAN DER WILK, Ronald

Address:

Netherlands (NL)

Priority

Priority Number:

201161544039 P

Priority Date:

06/10/2011

Priority Country:

United States (US)

Classification

IPC classification:

G03F 7/20;

Publication

European Patent Bulletin

Issue number:

201934

Publication date:

21/08/2019

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages