Patent details
EP2945184 Title: EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
Basic Information
- Publication number:
- EP2945184
- PCT Application Number:
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP151587805
- PCT Publication Number:
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- French Title of Invention:
- APPAREIL D'EXPOSITION, PROCÉDÉ D'EXPOSITION ET PROCÉDÉ DE PRODUCTION DU DISPOSITIF
- German Title of Invention:
- BELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG DER VORRICHTUNG
- SPC Number:
Dates
- Filing date:
- 26/02/2004
- Grant date:
- 28/06/2017
- EP Publication Date:
- 18/11/2015
- PCT Publication Date:
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 28/06/2017
- EP B1 Publication Date:
- 28/06/2017
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 26/02/2018
- Expiration date:
- 26/02/2024
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 28/06/2017
- Name:
- Nikon Corporation
- Address:
- 15-3, Konan 2-chome Minato-ku, Tokyo 108-6290, Japan (JP)
Inventor
1
- Name:
- Nishii, Yasufumi
- Address:
- Japan (JP)
2
- Name:
- Nagasaka, Hiroyuki
- Address:
- Japan (JP)
Priority
1
- Priority Number:
- 2003049365
- Priority Date:
- 26/02/2003
- Priority Country:
- Japan (JP)
2
- Priority Number:
- 2003110748
- Priority Date:
- 15/04/2003
- Priority Country:
- Japan (JP)
3
- Priority Number:
- 2003320100
- Priority Date:
- 11/09/2003
- Priority Country:
- Japan (JP)
Classification
- IPC classification:
- G03F 7/20; H01L 21/027;
Publication
European Patent Bulletin
- Issue number:
- 201726
- Publication date:
- 28/06/2017
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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