Patent details
EP3055076 Title: IMPROVED WAYS TO GENERATE PLASMA IN CONTINUOUS POWER MODE FOR LOW PRESSURE PLASMA PROCESSES
Basic Information
- Publication number:
- EP3055076
- PCT Application Number:
- EP2014071466
- Type:
- European Patent Granted for LU
- Legal Status:
- Unitary Effect Registered
- Application number:
- EP147818710
- PCT Publication Number:
- WO2015052199
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- IMPROVED WAYS TO GENERATE PLASMA IN CONTINUOUS POWER MODE FOR LOW PRESSURE PLASMA PROCESSES
- French Title of Invention:
- PROCÉDÉS AMÉLIORÉS DE GÉNÉRATION DE PLASMA EN MODE D'ALIMENTATION CONTINUE POUR PROCÉDÉS AU PLASMA À BASSE PRESSION
- German Title of Invention:
- VERBESSERTE VERFAHREN ZUR ERZEUGUNG VON PLASMA IM DAUERBETRIEBSMODUS FÜR NIEDERDRUCK-PLASMAVERFAHREN
- SPC Number:
Unitary Effect
- Unitary Effect Requested:
- Yes
- Unitary Effect Request Filing Date:
- 03/07/2023
- Link to UPP Register:
- European Patent Register
- Unitary Effect Request Withdrawal Date:
- Unitary Effect Status:
- Unitary Effect Registered
- Unitary Effect Acceptance Decision Date:
- 10/07/2023
- Unitary Effect Rejection Decision Date:
- Unitary Effect Date:
- 07/06/2023
- Unitary Effect Registration Date:
- 10/07/2023
- Unitary Effect Re-establishment of rights Filing Date:
- Unitary Effect Re-establishment of rights EPO Decision :
- Unitary Effect Re-establishment of rights EPO Decision Date:
- Explanatory Text UE:
- Safety Net Request Date:
- Safety Net Decision Date:
- Safety Net Decision Outcome:
- SPC Number:
Dates
- Filing date:
- 07/10/2014
- Grant date:
- 07/06/2023
- EP Publication Date:
- 17/08/2016
- PCT Publication Date:
- 16/04/2015
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 07/06/2023
- EP B1 Publication Date:
- 07/06/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- Expiration date:
- 07/10/2034
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 31/05/2023
- Name:
- Europlasma nv
- Address:
- Industriepark De Bruwaan 5D, 9700 Oudenaarde, Belgium (BE)
Inventor
1
- Name:
- ROGGE, Eva
- Address:
- Belgium (BE)
2
- Name:
- SERCU, Marc
- Address:
- Belgium (BE)
3
- Name:
- LEGEIN, Filip
- Address:
- Belgium (BE)
Priority
- Priority Number:
- 13187623
- Priority Date:
- 07/10/2013
- Priority Country:
- European Patent Office (EPO) (EP)
Classification
- IPC classification:
- H01J 37/32; C23C 16/50; B05D 1/00;
Publication
European Patent Bulletin
1
- Issue number:
- 202323
- Publication date:
- 07/06/2023
- Description:
- Grant (B1)
2
- Issue number:
- 202332
- Publication date:
- 09/08/2023
- Description:
- Unitary Effect Request Receipt
3
- Issue number:
- 202332
- Publication date:
- 09/08/2023
- Description:
- Unitary Effect Request Acceptance
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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