Patent details
EP3064483 Title: HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD
Basic Information
- Publication number:
- EP3064483
- PCT Application Number:
- JP2014078553
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP148581762
- PCT Publication Number:
- WO2015064550
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD
- French Title of Invention:
- HYDROCARBURE FLUORÉ DE GRANDE PURETÉ, UTILISATION EN TANT QUE GAZ DE GRAVURE PAR PLASMA ET PROCÉDÉ DE GRAVURE PAR PLASMA
- German Title of Invention:
- HOCHREINER FLUORIERTER KOHLENWASSERSTOFF, VERWENDUNG ALS EIN PLASMAÄTZGAS UND PLASMAÄTZVERFAHREN
- SPC Number:
Dates
- Filing date:
- 28/10/2014
- Grant date:
- 01/05/2019
- EP Publication Date:
- 07/09/2016
- PCT Publication Date:
- 07/05/2015
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 01/05/2019
- EP B1 Publication Date:
- 01/05/2019
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 28/10/2019
- Expiration date:
- 28/10/2034
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 24/04/2019
- Name:
- Zeon Corporation
- Address:
- 6-2, Marunouchi 1-chome, Chiyoda-ku Tokyo 100-8246, Japan (JP)
Inventor
- Name:
- SUGIMOTO, Tatsuya
- Address:
- Japan (JP)
Priority
- Priority Number:
- 2013225480
- Priority Date:
- 30/10/2013
- Priority Country:
- Japan (JP)
Classification
- IPC classification:
- C07C 19/08; H01J 37/32;
Publication
European Patent Bulletin
- Issue number:
- 201918
- Publication date:
- 01/05/2019
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
| Filing date | Document type | Number of pages |
|---|