Patent details
EP3098332 Title: SPUTTERING TARGET
Basic Information
- Publication number:
- EP3098332
- PCT Application Number:
- JP2015051395
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP157410259
- PCT Publication Number:
- WO2015111576
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- SPUTTERING TARGET
- French Title of Invention:
- CIBLE DE PULVÉRISATION
- German Title of Invention:
- SPUTTER-TARGET
- SPC Number:
Dates
- Filing date:
- 20/01/2015
- Grant date:
- 16/10/2019
- EP Publication Date:
- 30/11/2016
- PCT Publication Date:
- 30/07/2015
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 16/10/2019
- EP B1 Publication Date:
- 16/10/2019
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 20/01/2020
- Expiration date:
- 20/01/2035
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 09/10/2019
- Name:
- Sumitomo Chemical Company, Limited
- Address:
- 27-1, Shinkawa 2-chome Chuo-ku, Tokyo 104-8260, Japan (JP)
Inventor
1
- Name:
- KURODA, Toshiaki
- Address:
- Japan (JP)
2
- Name:
- TAKIGAWA, Mikio
- Address:
- Japan (JP)
Priority
- Priority Number:
- 2014008740
- Priority Date:
- 21/01/2014
- Priority Country:
- Japan (JP)
Classification
- IPC classification:
- C23C 14/34; H01J 37/34; H01L 21/285;
Publication
European Patent Bulletin
- Issue number:
- 201942
- Publication date:
- 16/10/2019
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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