Patent details

Basic Information

Publication number:

EP3137847

PCT Application Number:

EP2015000872

Type:

European Patent Granted for LU

Legal Status:

Lapsed

Application number:

EP157215716

PCT Publication Number:

WO2015165587

First applicant's nationality:

Translation Language:

EPO Publication Language:

German

English Title of Invention:

INTERFEROMETRIC DISPLACEMENT SENSOR FOR INTEGRATION INTO MACHINE TOOLS AND SEMICONDUCTOR LITHOGRAPHY SYSTEMS

French Title of Invention:

CAPTEUR DE DÉPLACEMENT INTERFÉROMÉTRIQUE DESTINÉ À ÊTRE INTÉGRÉ DANS DES MACHINES-OUTILS ET DES SYSTÈMES DE LITHOGRAPHIE À SEMI-CONDUCTEUR

German Title of Invention:

INTERFEROMETRISCHER WEGSENSOR ZUR INTEGRATION IN WERKZEUGMASCHINEN UND HALBLEITER-LITHOGRAFIESYSTEMEN

SPC Number:

Dates

Filing date:

29/04/2015

Grant date:

13/04/2022

EP Publication Date:

08/03/2017

PCT Publication Date:

05/11/2015

Claims Translation Received Date:

Translations Received Date (B1 EP Publication):

Translations Received Date (B2 EP Publication):

Translations Received Date (B3 EP Publication):

Publication date:

13/04/2022

EP B1 Publication Date:

13/04/2022

EP B2 Publication Date:

EP B3 Publication Date:

Lapsed date:

29/04/2022

Expiration date:

29/04/2035

Renunciation date:

Revocation date:

Annulment date:

Owner

From:

06/04/2022

 

 

Name:

Attocube Systems AG

Address:

Eglfinger Weg 2, 85540 Haar, Germany (DE)

Inventor

1

Name:

THURNER, Klaus

Address:

Germany (DE)

2

Name:

ZECH, Martin

Address:

Germany (DE)

Priority

Priority Number:

102014006305

Priority Date:

30/04/2014

Priority Country:

Germany (DE)

Classification

IPC classification:

G01B 5/00; G01D 11/24;

Publication

European Patent Bulletin

Issue number:

202215

Publication date:

13/04/2022

Description:

Grant (B1)

Annual Fees

Annual Fee Due Date:

Annual Fee Number:

Expected Payer:

Last Annual Fee Payment Date:

Last Annual Fee Paid Number:

Payer:

Filing date	Document type	Number of pages