Patent details
EP3394674 Title: NEGATIVE-WORKING PHOTORESIST COMPOSITIONS FOR LASER ABLATION AND PROCESSES USING THEM
Basic Information
- Publication number:
- EP3394674
- PCT Application Number:
- EP2016081903
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP168158558
- PCT Publication Number:
- WO2017108778
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- NEGATIVE-WORKING PHOTORESIST COMPOSITIONS FOR LASER ABLATION AND PROCESSES USING THEM
- French Title of Invention:
- COMPOSITIONS DE RÉSINE PHOTOSENSIBLE DE TRAVAIL NÉGATIF D'ABLATION AU LASER ET PROCÉDÉS FAISANT APPEL À CES DERNIÈRES
- German Title of Invention:
- NEGATIV ARBEITENDE PHOTORESISTZUSAMMENSETZUNGEN ZUR LASERABLATION UND VERFAHREN ZU DEREN VERWENDUNG
- SPC Number:
Dates
- Filing date:
- 20/12/2016
- Grant date:
- 06/05/2020
- EP Publication Date:
- 31/10/2018
- PCT Publication Date:
- 29/06/2017
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 06/05/2020
- EP B1 Publication Date:
- 06/05/2020
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 20/12/2020
- Expiration date:
- 20/12/2036
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 16/10/2020
- Name:
- Merck Patent GmbH
- Address:
- Frankfurter Strasse 250, 64293 Darmstadt, Germany (DE)
History of Owners
- From:
- 29/04/2020
- To:
- 16/10/2020
- Name:
- AZ Electronic Materials Luxembourg S.à.r.l.
- Address:
- 46 Place Guillaume II, 1648 Luxembourg, Luxembourg (LU)
Inventor
1
- Name:
- LIU, Weihong
- Address:
- United States (US)
2
- Name:
- CHEN, Chunwei
- Address:
- United States (US)
3
- Name:
- LU, PingHung
- Address:
- United States (US)
Priority
- Priority Number:
- 201514976498
- Priority Date:
- 21/12/2015
- Priority Country:
- United States (US)
Classification
- IPC classification:
- G03F 7/004; G03F 7/038; G03F 7/36; G03F 7/38; G03F 7/40;
Publication
European Patent Bulletin
1
- Issue number:
- 202019
- Publication date:
- 06/05/2020
- Description:
- Grant (B1)
2
- Issue number:
- 202047
- Publication date:
- 18/11/2020
- Description:
- Transfer of Rights
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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