Patent details
EP3511774 Title: NEGATIVE-WORKING PHOTORESIST COMPOSITION FOR LASER ABLATION AND PROCESS USING IT
Basic Information
- Publication number:
- EP3511774
- PCT Application Number:
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP191584978
- PCT Publication Number:
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- NEGATIVE-WORKING PHOTORESIST COMPOSITION FOR LASER ABLATION AND PROCESS USING IT
- French Title of Invention:
- COMPOSITIONS DE RÉSINE PHOTOSENSIBLE À ACTION NÉGATIVE POUR ABLATION LASER ET PROCÉDÉ L' UTILISANT
- German Title of Invention:
- NEGATIV ARBEITENDE PHOTORESISTZUSAMMENSETZUNGEN ZUR LASERABLATION UND METHODE UNTER DEREN VERWENDUNG
- SPC Number:
Dates
- Filing date:
- 20/12/2016
- Grant date:
- 27/10/2021
- EP Publication Date:
- 17/07/2019
- PCT Publication Date:
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 27/10/2021
- EP B1 Publication Date:
- 27/10/2021
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 20/12/2021
- Expiration date:
- 20/12/2036
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 01/04/2022
- Name:
- Merck Patent GmbH
- Address:
- Frankfurter Strasse 250, 64293 Darmstadt, Germany (DE)
History of Owners
- From:
- 20/10/2021
- To:
- 01/04/2022
- Name:
- Merck Patent GmbH
- Address:
- Frankfurter Strasse 250, 64293 Darmstadt, Germany (DE)
Inventor
1
- Name:
- Lu, PingHung
- Address:
- United States (US)
2
- Name:
- Liu, Weihong
- Address:
- United States (US)
3
- Name:
- Chen, Chunwei
- Address:
- United States (US)
Priority
- Priority Number:
- 201514976498
- Priority Date:
- 21/12/2015
- Priority Country:
- United States (US)
Classification
- IPC classification:
- G03F 7/038; G03F 7/004; G03F 7/36; G03F 7/38; G03F 7/40; G03F 7/20; G03F 7/027;
Publication
European Patent Bulletin
1
- Issue number:
- 202143
- Publication date:
- 27/10/2021
- Description:
- Grant (B1)
2
- Issue number:
- 202218
- Publication date:
- 04/05/2022
- Description:
- Change of owner's name or address
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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