Patent details
EP3537474 Title: PHOTORESIST STRIPPER
Basic Information
- Publication number:
- EP3537474
- PCT Application Number:
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP191617760
- PCT Publication Number:
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- PHOTORESIST STRIPPER
- French Title of Invention:
- DÉCAPANT POUR RÉSINE PHOTOSENSIBLE
- German Title of Invention:
- PHOTOLACKENTFERNER
- SPC Number:
Dates
- Filing date:
- 09/03/2019
- Grant date:
- 02/08/2023
- EP Publication Date:
- 11/09/2019
- PCT Publication Date:
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 02/08/2023
- EP B1 Publication Date:
- 02/08/2023
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 09/03/2024
- Expiration date:
- 09/03/2039
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 26/07/2023
- Name:
- Versum Materials US, LLC
- Address:
- 8555 S. River Parkway, Tempe, AZ 85284, United States (US)
Inventor
1
- Name:
- CAO, Yuanmei
- Address:
- United States (US)
2
- Name:
- DALTON, Richard Peters
- Address:
- United States (US)
3
- Name:
- PHENIS, Michael T.
- Address:
- United States (US)
Priority
- Priority Number:
- 201916286808
- Priority Date:
- 27/02/2019
- Priority Country:
- United States (US)
Classification
- IPC classification:
- H01L 21/311; G03F 7/42;
Publication
European Patent Bulletin
- Issue number:
- 202331
- Publication date:
- 02/08/2023
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
| Filing date | Document type | Number of pages |
|---|