Patent details

EP3647384 Title: SUPPRESSING SIN REMOVAL RATES AND REDUCING OXIDE TRENCH DISHING FOR SHALLOW TRENCH ISOLATION (STI) PROCESS

  • Data
  • Documents

Basic Information

Publication number:
EP3647384
PCT Application Number:
Type:
European Patent Granted for LU
Legal Status:
In force
Application number:
EP192066728
PCT Publication Number:
First applicant's nationality:
Translation Language:
EPO Publication Language:
English
English Title of Invention:
SUPPRESSING SIN REMOVAL RATES AND REDUCING OXIDE TRENCH DISHING FOR SHALLOW TRENCH ISOLATION (STI) PROCESS
French Title of Invention:
SUPPRESSION DES TAUX D'ENLÈVEMENT DE SIN ET RÉDUCTION DU CREUSAGE DE TRANCHÉES À OXYDE POUR UN PROCÉDÉ D'ISOLATION DE TRANCHÉE PEU PROFONDE (STI)
German Title of Invention:
UNTERDRÜCKUNG DER SIN-ENTFERNUNGSRATEN UND REDUZIERUNG DES OXID-TRENCH-DISHING FÜR PROZESS DER FLACHGRABENISOLATION (STI)
SPC Number:

Dates

Filing date:
31/10/2019
Grant date:
12/06/2024
EP Publication Date:
06/05/2020
PCT Publication Date:
Claims Translation Received Date:
Translations Received Date (B1 EP Publication):
Translations Received Date (B2 EP Publication):
Translations Received Date (B3 EP Publication):
Publication date:
12/06/2024
EP B1 Publication Date:
12/06/2024
EP B2 Publication Date:
EP B3 Publication Date:
Lapsed date:
Expiration date:
31/10/2039
Renunciation date:
Revocation date:
Annulment date:

Owner

From:
05/06/2024
 
 

Name:
Versum Materials US, LLC
Address:
8555 S. River Parkway, Tempe, AZ 85284, United States (US)

Inventor

1

Name:
O'NEILL, Mark Leonard
Address:
United States (US)

2

Name:
MURELLA, Krishna P.
Address:
United States (US)

3

Name:
SHI, Xiaobo
Address:
United States (US)

4

Name:
ZHOU, Hongjun
Address:
United States (US)

5

Name:
ROSE, Joseph D
Address:
United States (US)

Priority

1

Priority Number:
201862753431 P
Priority Date:
31/10/2018
Priority Country:
United States (US)

2

Priority Number:
201916664924
Priority Date:
27/10/2019
Priority Country:
United States (US)

Classification

IPC classification:
C09G 1/02; C09K 3/14; H01L 21/3105;

Publication

European Patent Bulletin

Issue number:
202424
Publication date:
12/06/2024
Description:
Grant (B1)

Annual Fees

Annual Fee Due Date:
30/04/2025
Annual Fee Number:
6
Annual Fee Amount:
66 Euro
Penalty Fee Amount:
20 Euro
Expected Payer:
Last Annual Fee Payment Date:
Last Annual Fee Paid Number:
Payer: