Patent details
EP3899662 Title: METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
Basic Information
- Publication number:
- EP3899662
- PCT Application Number:
- EP2019081282
- Type:
- European Patent Granted for LU
- Legal Status:
- Lapsed
- Application number:
- EP198010449
- PCT Publication Number:
- WO2020126242
- First applicant's nationality:
- Translation Language:
- EPO Publication Language:
- English
- English Title of Invention:
- METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
- French Title of Invention:
- PROCÉDÉ DE COMMANDE D'UN PROCESSUS DE FABRICATION ET APPAREILS ASSOCIÉS
- German Title of Invention:
- VERFAHREN ZUR STEUERUNG EINES HERSTELLUNGSVERFAHRENS UND ZUGEHÖRIGE VORRICHTUNGEN
- SPC Number:
Dates
- Filing date:
- 14/11/2019
- Grant date:
- 01/06/2022
- EP Publication Date:
- 27/10/2021
- PCT Publication Date:
- 25/06/2020
- Claims Translation Received Date:
- Translations Received Date (B1 EP Publication):
- Translations Received Date (B2 EP Publication):
- Translations Received Date (B3 EP Publication):
- Publication date:
- 01/06/2022
- EP B1 Publication Date:
- 01/06/2022
- EP B2 Publication Date:
- EP B3 Publication Date:
- Lapsed date:
- 14/11/2022
- Expiration date:
- 14/11/2039
- Renunciation date:
- Revocation date:
- Annulment date:
Owner
- From:
- 25/05/2022
- Name:
- ASML Netherlands B.V.
- Address:
- P.O. Box 324, 5500 AH Veldhoven, Netherlands (NL)
Inventor
1
- Name:
- TABERY, Cyrus, Emil
- Address:
- United States (US)
2
- Name:
- BRANTJES, Nicolaas Petrus Marcus
- Address:
- Netherlands (NL)
3
- Name:
- LIN, Chenxi
- Address:
- United States (US)
4
- Name:
- ZOU, Yi
- Address:
- United States (US)
5
- Name:
- HASTINGS, Simon, Philip, Spencer
- Address:
- United States (US)
6
- Name:
- COX, Matthijs
- Address:
- Netherlands (NL)
7
- Name:
- CHENG, Yana
- Address:
- United States (US)
8
- Name:
- ZHANG, Youping
- Address:
- United States (US)
9
- Name:
- GENIN, Maxime, Philippe, Frederic
- Address:
- United States (US)
10
- Name:
- MENCHTCHIKOV, Boris
- Address:
- United States (US)
Priority
1
- Priority Number:
- 18214013
- Priority Date:
- 19/12/2018
- Priority Country:
- European Patent Office (EPO) (EP)
2
- Priority Number:
- 201962802866 P
- Priority Date:
- 08/02/2019
- Priority Country:
- United States (US)
Classification
Publication
European Patent Bulletin
- Issue number:
- 202222
- Publication date:
- 01/06/2022
- Description:
- Grant (B1)
Annual Fees
- Annual Fee Due Date:
- Annual Fee Number:
- Expected Payer:
- Last Annual Fee Payment Date:
- Last Annual Fee Paid Number:
- Payer:
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